Brooks Automation 001-4130-03 001-4130-11
The Brooks Automation 001-4130-03 controller is widely used in semiconductor manufacturing equipment with advanced features such as programmable alignment and automatic vision systems. In addition, it is also used in various semiconductor processing equipment.
The technical specifications of the Brooks Automation 001-4130-03 wafer alignment controller are as follows:
Control accuracy: ±0.1μm.
Alignment speed: ≤1 second.
Repeatability: ≤0.1μm.
Communication interface: RS-232, RS-485, Ethernet.
In addition, the module uses high-precision sensors and servo drivers, which can control the movement of the wafer in X, Y, and θ directions, so that it is perfectly aligned with the target position.
